Fabrication of photonic band-gap crystals

نویسنده

  • C. C. Cheng
چکیده

We describe the fabrication of three-dimensional photonic crystals using a reproducible and reliable procedure consisting of electron beam lithography followed by a sequence of dry etching steps. Careful fabrication has enabled us to define photonic crystals with 280 nm holes defined with 350 nm center to center spacings in GaAsP and GaAs epilayers. We construct these photonic crystals by transferring a submicron pattern of holes from 70-nm-thick polymethylmethacrylate resist layers into 300-nm-thick silicon dioxide ion etch masks, and then anisotropically angle etching the III-V semiconductor material using this mask. Here, we show the procedure used to generate photonic crystals with up to four lattice periods depth. © 1995 American Vacuum Society.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Design and Analysis of a Novel Hexagonal Shaped Channel Drop Filter Based on Two-Dimensional Photonic Crystals

In this paper a new optical channel drop filter (CDF) based on two dimensional (2-D) photonic crystals (PhC) with hexagonal shaped structure is proposed and numerically demonstrated by using the finite-difference-time-domain (FDTD) and plane-wave-expansion (PWE) techniques. Photonic crystals (PhCs) are artificial dielectric nanostructure materials in which a periodic modulation of the material ...

متن کامل

Woodpile-type photonic crystals with orthorhombic or tetragonal symmetry formed through phase mask techniques.

This paper simulates the photonic band structure in face-centered-orthorhombic and face-centered-tetragonal woodpile-type photonic crystals and shows the fabrication feasibility of these crystals with phase mask based holographic lithography. The experimental demonstration on SU-8 photoresist indicates that a single optical element can replace a complex optical setup for the holographic fabrica...

متن کامل

Influence of optical Kerr coefficient on photonic band structures of hexagonal-lattice function photonic crystals

In this paper, we have studied the photonic band structure of function photonic crystals in which the dielectric constant of the scattering centers (rods) is a function of space coordinates. The under-studied lattice is hexagonal and cross section of rods has a circular symmetry embedded in the air background. Photonic band structures for both electric and magnetic polarizations of the electrom...

متن کامل

Phase Properties of One-Dimensional Quaternary Photonic Crystals

In this paper, properties of reflection phase in one-dimensional quaternary photonic crystals combining dispersive meta-materials and positive index materials are investigated by transfer matrix method. Two omnidirectional band gaps are located in the band structure of considered structure. However, we limit our studies to the frequency range of the second wide band gap. We observe that the val...

متن کامل

Fabrication and Characterization of 3D Square Spiral Photonic Crystals

Photonic crystals have demonstrated potential for application in many fields and devices. We demonstrate practical fabrication of three-dimensional photonic crystals using the glancing angle deposition thin film fabrication technique. Optical characterization provides strong evidence for the existence of a complete photonic band gap in three dimensions, centered at 1.6 m. We also investigate th...

متن کامل

A New Method for Calculating Propagation Modes of a One Dimensional Photonic Crystal (RESEARCH NOTE)

Photonic band-gap (PBG) crystals offer new dimensions of freedom in controlling propagation of electromagnetic waves. The existence of stop-bands in the transmission characteristic of these crystals makes them a suitable element for the realization of many useful microwave and optical subsystems. In this paper, we calculate the propagation constant of a one-dimensional (1-D) photonic crystal by...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:

دوره   شماره 

صفحات  -

تاریخ انتشار 1996